Comparison of Optical Properties of Aluminum-doped Zinc Oxide (AZO) and Tin-doped Indium Oxide (ITO) Nanostructure Layers

Document Type : Research Paper

Authors

1 M.Sc. in Physics, Photonics and Quantum Technologies Research School, Nuclear Science and Technology Research Institute (NSTRL).

2 Assistant Professor, Photonics and Quantum Technologies Research School, Nuclear Science and Technology Research Institute (NSTRL)

Abstract

The optical properties of aluminum-doped zinc oxide (AZO) and tin-doped indium oxide (ITO) thin films on glass and the flexible polymer substrate (PET) are studied and are compared. The purpose of this study is to obtain optimal layers with a minimum specific resistance and a clear transparency in the visible area. In the AZO and ITO coatings, two anti-reflective coatings for different applications are designed to increase transmission by the MacLeod coating software. For the two coating types, the highest transmission through the visible area (400 to 700 nm) was 98.01% and 95.41% for the AZO coatings and 81.85% and 79.45% for the ITO coatings. Also, by changing the substrate from glass to PET for the single layer of AZO and ITO, the average percentage of light transmission increased, and the rate of change in light transmission per wavelength was decreased. For two types of anti-reflective coatings of AZO and ITO layers, by changing the substrate from glass to PET, the highest transmission in the visible area (400 to 700 nm) was to 97.87 and 96.18% for AZO coatings and 82.23% and 80.04% for ITO coatings.

Keywords

Main Subjects


[1] Shakeri Shamsi M., Ahmadi M., Sabet M., “Al Doped ZnO Thin Films; Preparation and Characterization”, J. Nanostruct. 8(4), (2018) 404-407.
[2] Du J., Chen X., Liu C., Ni J., Hou G., Zhao Y., Zhang X., “Highly transparent and conductive indium tin oxide thin films for solar cells grown by reactive thermal evaporation at low temperature”, Applied Physics A, 117 (2), (2014) 815.
[3] Bulovic V., Tiam P., Burrows P. E., Gokhale M. R., Forrest S. R., Thompson M. E., “A Surface-emitting Vaccum-Deposition Organic Light Emitting Device”, Appl. Phys. Lett. 70, (1997), 2954.
[4] Guo T., Zheng L., Nshimiyimana J. P., Diao X., and Chen Q., “Design of antireflective coatings for AZO low infrared emissivity layer”, Chinese Optics Letters, COL 11(Suppl.), (2013) S10103.
[5] Guillen C., Herrero J., “Influence of oxygen in the deposition and annealing atmosphere”, Vacuum, Vol. 80, (2006), pp. 615-620.
[6] Yoon-Heung Tak, “Criteria for ITO (indium–tin-oxide) thin film as the bottom electrode of an organic light emitting diode”, Thin Solid Films, Vol. 411, (2002), pp. 12-16.
[7] Her S. C. and Chang C. F., “Effect of Sputtering Power on Optical and Electrical Properties of Indium Tin Oxide Films”, Sensors and Materials, Vol. 28, (2016), pp. 975-981.
[8] Juan X., YuJie Y., Fang W., and Kailiang Z., “Influence of substrate temperature on properties of indium tin oxide thin films prepared by DC magnetron sputtering”, ECS Transactions, Vol. 44, (2012), p. 1311–1316.
[9] Moshabaki Esfahani, A, Kadivar, E., Firoozi Far, A., “The influence of argon gas flow on the roughness of the ITO nanolayer thin film”, Proceeding of 8th Vacuum Conf., Shahid beheshti University, Tehran, 22-23 November (2017), p. 65-68. (In persian)
 [10] Xie G. C., Fang L., Peng L. P., Liu G. B., Ruan H. B., Wu F., Kong C. Y., “Effect of In-doping on the optical constants of ZnO thin films”, Physics Procedia, Vol. 32 (2012), p. 651 – 657.
[11] Zheng H., Zhang R. J., Li D. H., Chen X., Wang S. Y., Zheng Y. X., Li M. J., Hu Z. G., Dai N. and Chen L. Y. “Optical Properties of Al-Doped ZnO Films in the Infrared Region and Their Absorption Applications”, Nanoscale Research Letters, (2018) 13:149.
[12] Kim Y., Lee W., Jung D. R., Kim J., Nam S., and Kim H., “Optical and electronic properties of post annealed ZnO;Al thin films”, Appl. Phys. Lett. 96, (2010) 171902.
[13] Zhang Y., Li Y., Li Ch., Wang W., Zhang J., Wang R., “Effects of dopant content on optical and electrical properties of In2O3: W transparent conductive films”, Rare Metals, 31 (2), (2012)168–171.