مقاله پژوهشی: ساخت و مطالعه ویژگی‌های موجبر صفحه‌ای بر پایه پلیمرSU-8 با زیرلایه‌های متفاوت

نوع مقاله : مقاله پژوهشی

نویسندگان

استادیار، پژوهشکده فوتونیک و فناوری‌های کوانتومی، پژوهشگاه علوم و فنون هسته‌ای، سازمان انرژی اتمی، تهران، ایران

چکیده

در این کار، موجبرهای صفحه‌ای حاصل از لایه نشانی پلیمر SU-8 بر روی دو زیرلایه PET و کوارتز بررسی می‌شوند. معادله‌های ماکسول را برای موجبرهای طراحی شده حل می‌کنیم تا معادله‌های مشخصه حاصل شوند. از حل این معادله‌ها، حداقل ضخامت لازم SU-8 برای عملکرد به عنوان موجبر تعیین می‌گردد. سپس موجبرها ساخته شده و با دستگاه‌های پروفایلومتری و طیف سنجی UV-Vis-IR مشخصه یابی می‌شوند. مشاهده می شود که پلیمر SU-8 عبور نوری مطلوبی از خود نشان می‌دهد و در قالب موجبری با زیرلایه PET عملکرد بهتری دارد. در ادامه برای تعیین ضریب شکست موثر موجبر و نحوه انتشار موج از روش المان محدود استفاده می‌شود. نتایج شبیه سازی نشان می دهند که پدیده بازتاب کلی که شرط اساسی موجبری است در افزاره PET/SU-8 نسبت به Quartz/SU-8 بهتر رخ می دهد. بنابراین انعطاف پذیری و مقرون به صرفه‌ بودن PET آن را جایگزین مناسبی برای زیرلایه‌‌های جامد متداول مانند کوارتز می سازد.

کلیدواژه‌ها

موضوعات


عنوان مقاله [English]

Research Paper: Fabrication and Study of Planar Waveguide Based on SU-8 Polymer using Different Substrates

نویسندگان [English]

  • Somaye Zare
  • Zahra Sadat Hosseini
Assistant Professor, Photonics and Quantum Technologies Research School, Nuclear Science and Technology Research Institute (NSTRI), Tehran, Iran
چکیده [English]

In this work, the planar waveguides are investigated by depositing a SU-8 polymer on PET and quartz substrates. Maxwell equations are solved for the designed waveguides to obtain the characteristic equations. By solving these equations, the minimum thickness of SU-8 necessary for operation as a waveguide is found. Afterward, the waveguides are fabricated and characterized by profilometry and UV-Vis-IR spectroscopy. It is observed that SU-8 polymer shows suitable optical transmission. Then, the effective refractive index of the waveguide, as well as the wave propagation, is recognized by the finite element method. The results of simulations show that the total reflectance phenomenon that is required for a waveguide operation is occurring more effectively in the PET/SU-8 device than in the Quartz/SU-8 and in a waveguide configuration, it possesses better performance. Also, the flexibility and low cost of PET make it a proper candidate for substitution of the typical rigid substrate such as quartz. 

کلیدواژه‌ها [English]

  • SU-8 polymer
  • Substrate
  • Effective refractive index
  • Planar waveguide
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